Gijutsu Hyoronsha First Semiconductor Dry Etching Technology Revised Edition
#Grup produk P117805598
Spesifikasi
| Author Name | Kazuo Nojiri |
|---|---|
| Classification | Specialty |
| First Edition Date | 44136 |
| Genre | electronic communication |
| Page Number | 188 |
| Suitable Paper Size | A5 |
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Description
Chapter 1 Development of semiconductor integrated circuits and dry etching technology; Chapter 2 Dry etching mechanism; Chapter 3 Etching of various materials; Chapter 4 Dry etching equipment; Chapter 5 Dry etching damage; Chapter 6 New etching technology; Chapter 7 Atomic layer etching ( ALE); Chapter 8 Future Challenges and Prospects for Dry Etching Technology
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