The Tough Gauge is a combined vacuum gauge that combines a BA ionization vacuum gauge and a Pirani vacuum gauge. With this single device, it can automatically switch and measure a wide range of vacuum conditions, from atmospheric pressure to ultra-high vacuum. The Pirani vacuum gauge has a built-in thermometer for temperature compensation, reducing errors due to temperature changes. Furthermore, the Pirani vacuum gauge uses corrosion-resistant materials, and in high vacuum conditions, the BA ionization vacuum gauge operates in tough mode while heating the grid and collector, so sensitivity does not decrease even in contaminated environments, and accurate measurements can be taken over a long period of time.
Vacuum deposition equipment, etching equipment, sputtering equipment, electron microscope, ion implantation equipment, LPCVD equipment, mass spectrometer, accelerator, organic EL material purification
*This unit does not include a power supply. Please use the TG200CBL (power and communication cable) separately.
MIRAPRO Combined Vacuum Gauge Tough Gauge
#Grup produk P116999915
Sebelum PPN:
Rp51.999.900 - Rp73.999.900
Ketersediaan:
Periksa Metode Pembayaran dan Estimasi pengiriman
Spesifikasi
| Input Power (V) | DC24,0.8A |
|---|---|
| Input Signal | Measurement start/stop, degassing, tough mode ON/OFF |
| Interface | RS232C, display (TGD100), connectable to PC |
| Material | Pirani: Ni, Pirani thermometer: Pt100, BA filament: Y-lr, grid: Pt-Mo, collector: Pt-Mo |
| Measuring Range | 1x10<sup>-8</sup>Pa~1.2x10<sup>5</sup>Pa |
| Output | Pressure signal: 0-10V x 1 channel |
| Output Signal | Setpoint contact x 2ch, alarm contact |
| Pressure unit | Pa/Torr/mbar |
| ROHS Directive (Corresponding to 10 Substances) | Correspondence |
| Type | Transmitter type (with LED display) |
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Informasi Produk
Description
Feature
Specification*Tough Mode: Grid and collector electrodes are heated by power during measurement. Can be set to OFF/approx. 300°C/approx. 500°C/approx. 700°C. *Degassing: Grid and collector are flash-heated to approx. 900°C.
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