ULVAC Single-phase multi-mechanical booster pump

By adopting a DC brushless motor, it is operated at the optimum rotation speed according to the load, so vacuum exhaust from atmospheric pressure is possible.
Due to the structure of the magnet coupling, there is no oil leakage to the outside of the pump.
A non-contact seal is used for the seal inside the pump, greatly reducing mechanical loss.
By switching the power supply inside the driver box, it is possible to operate in 100V system and 200V system.
Vacuum dryer, freeze vacuum dryer, He leak test, CO2 gas laser, vacuum defoaming, vacuum heat treatment, liquid crystal injection into analytical equipment and CVD equipment
* The mechanical booster pump cannot be used alone. Be sure to combine it with the auxiliary pump.
* The mechanical booster pump is designed to be used in-line. Fix the flange on the discharge side and attach the pump to this flange.
* Lubricating oil will foam at startup during initial operation and long-term operation, so use the auxiliary pump to exhaust air for degassing.
* Operation near atmospheric pressure will be about the same as the exhaust speed of the auxiliary pump, so the features of the booster will not be exhibited.
* If the amount of lubricating oil exceeds the specified amount, oil will enter the rotor chamber.