KOFLOC Standard mass flow controller MODEL 3660 SERIES + dedicated readout unit + dedicated cable

Mass flow controller for argon gas (AR). The flow rate is controlled by the built-in solenoid actuator. By connecting the dedicated lead-out unit CR-400B, the flow rate can be set and displayed, and it can be driven by AC100V.
We have many achievements as standard adopted products of various analytical instruments and vacuum equipment from research and development applications of universities and research institutes.
* There are many variations in specifications depending on various conditions such as fluid and flow rate. Please be sure to check the model before selecting.

[Model description]
3660 or 3665-(Connection)-(Fluid)-(Maximum flow rate)-(Calibration temperature)
* Connection: RC1 / 4 (1/4 pipe taper female thread) or 1 / 4SW (1/4 swage lock bite fitting), etc.
* Maximum flow rate: SCCM (Standard Cubic Centimeter per Minute) or SLM (Standard Liter per Minute)
* Calibration temperature: 20 °C or 0 °C

CP-STD1- (cable length)

[MODEL 3660 SERIES standard specifications]
Sensor method: Thermal sensor Maximum flow range (N2 conversion): 10SCCM-100SLM
Valve method: Proportional solenoid valve (closed when not energized)
Control range: FS2-100% (* FS5-100%)
Responsiveness: Within 2 sec (within FS ± 2%) (* Within 3 sec (within FS ± 2%))
Accuracy: FS ± 1% (25 °C) (* FS ± 1.5% (25 °C))
Temperature coefficient: FS ± 0.1 / ° C (15-35 ° C) (* FS ± 0.2 / ° C (15-35 ° C))
Reproducibility: FS ± 0.5%
Operating differential pressure: FS ≤ 5SLM 50-300KPA (G), FS> 5SLM 100-300KPA (G) (* FS ≤ 50SLM 150-300KPA (G), FS> 50SLM 200-300KPA (G))
Operable pressure: 500KPA (G) or less Withstand voltage: 980KPA (G)
Leak rate: 1 x 10-8 Pa ・ m ² / s or less (not including He transmission)
Allowable ambient temperature: 5 to 45 ° C
Allowable ambient humidity: 10-90% (no condensation)
Gas contact material: Body SUS316, valve seat / seal material FKM
Electrical connection: Dsub 9-pin KFC Standard (SEMI Standard compliant)
Analog input: 0 to 5VDC (input impedance 1MΩ or more)
Analog output: 0 to 5VDC (external load resistance 250KΩ or more)
Required power supply: + 15VDC (± 5%) 100mA, -15VDC (± 5%) 250mA
Weight: Approximately 1000g (* Approximately 1500g)
*... For model 3665 (30SLM ~)

[CR-400B standard specifications]
Mass flow control function: Flow rate setting, valve forced opening and closing, zero cut mass flow input / output: 0 to 5VDC
Mass flow power supply: ± 15VDC (300mA)
Display digit: Instantaneous flow rate 4 digits Display performance: Instantaneous flow rate FS ± 0.1% ± 1 digit or less External control function: Rear input terminal Analog signal, RS-485 communication (half-duplex)
Event output: 2 stages (select from instantaneous upper limit / instantaneous lower limit / instantaneous upper and lower limit), open collector output (maximum rating 50V / 50mA)
Power consumption: Approximately 25W
AC power supply: 85-264VAC 48-440Hz
Weight: Approximately 400g